Lecture Notes

Class sessions 1 through 18 are lectures. Notes for most of these sessions are provided in the following table.

SES # TOPICS SESSION CATEGORIES INSTRUCTORS LECTURE NOTES
1 Introduction to MuSS and SPM Case Study

Course Goals, Logistics and Expectations

Comparison of MuSS and MoSS Fundamentals

MuSS Example: Overview of SPM Technology
Fundamental Principles Prof. Martin L. Culpepper (PDF)
2 MuSS Design Fundamentals and Methods

MuSS Design Fundamentals and Methods

Design Principles and Systems Design

MuSS Manufacturing Issues
Fundamental Principles Prof. Sang-Gook Kim (PDF - 1.5 MB)
3 Macro/Meso-scales Components and Characteristics

Principles, Metrics and Types of Cross-scale Incompatibilities

Incompatibilities of Macro/Meso Parts with Micro/Nano Parts

Integrating Constraints on Macro/Meso-scale Parts
Fundamental Principles Prof. Martin L. Culpepper (PDF - 2.6 MB)
4 Micro-scale Components and Characteristics

Principles of Macro/Meso-scale and Micro-scale Part Integration

Incompatibilities of Micro Parts with Nano Parts

Micro-scale Part Errors and Implications for Integration
Fundamental Principles Prof. Martin L. Culpepper (PDF - 1.3 MB)
5 Nano-scale Components and Characteristics

Principles of nm-scale Physics which Govern Integration Incompatibility

Nano-scale Actuators, Structures and Sensors

Trasmissability of Nano-scale Errors to other Scales
Fundamental Principles Prof. Martin L. Culpepper (PDF - 1.7 MB)
6 Scanning Probe Microscopy Project Introduction

Project Goals and Expectations

Demonstration of 2.76 SPM

Questions, Team Selection and Planning
Case Study/Application Soohyung Kim, Course TA (PDF)
7 Piezo MEMS: Materials

Piezoelectricity

Materials

Processing
Fundamental Principles Prof. Sang-Gook Kim (PDF 1 of 2 - 3.0 MB)

(PDF 2 of 2 - 2.4 MB)
8 Piezoelectric MEMS: Applications

Piezoelectric Transducers

Micro-actuators

Sensors and Generators
Case Study/Application Prof. Sang-Gook Kim (PDF - 1.7 MB)
9 Optical MEMS

Functionality

Devices

Materials
Fundamental Principles Prof. Sang-Gook Kim (PDF)
10 Nominal and Statistical Error Budgets

Principles of Determinism, Accuracy, Repeatability

Kinematic Error Modeling of Rigid-flexible Systems

Nominal and Probabilitic System Error Modeling
Design and Manufacturing Prof. Martin L. Culpepper (PDF)
11 Presentations on Paper Critiques Students
12 Mechanical Interfaces for Cross-scale Alignment

Principles of Mechanical Constraint

Design of Rigid, Flexible and Rigid-flexible Constraint

Manufacturing and Assembly of Cross-scale Interfaces
Design and Manufacturing Prof. Martin L. Culpepper (PDF - 2.5 MB)
13 Mechanisms for Inter-scale Motion

Principles of Mass, Momentum and Energy Incompatibility

Momentum Incompatibilities

Energy Incompatibilities
Design and Manufacturing Prof. Martin L. Culpepper (PDF)
14 Carbon Nanotubes

Synthesis

Properties and Applications

Issues of Manufacturing
Design and Manufacturing Prof. Sang-Gook Kim (PDF - 2.9 MB)
15 Complexity of MuSS

Uncertainty and Difficulty

Complexity

Functional Periodicity
Design and Manufacturing Prof. Sang-Gook Kim (PDF - 1.1 MB)
16 Metrology

System Requirements

Components and Selection Process

Metrology-Machine Integration
Design and Manufacturing Guest Lecturer
17 Telescopes and the Oil Industry

X-Ray Telescopes

Oil-well MEMS Sensors

Questions and Discussion
Case Study/Application Guest Lecturer
18 Data Acquisition, Sensors and Control

Programming in Simulink®

Introduction to dSPACE Control System

Demonstration of Acquisition and Control System
Design and Manufacturing Guest Lecturer