In the calendar below sessions 1 to 18 are lecture sessions and 19 to 24 are lab sessions. 

1 Introduction to MuSS and SPM Case Study

Course Goals, Logistics and Expectations

Comparison of MuSS and MoSS Fundamentals

MuSS Example: Overview of SPM Technology
Fundamental Principles Prof. Martin L. Culpepper Assessment test
2 MuSS Design Fundamentals and Methods

MuSS Design Fundamentals and Methods

Design Principles and Systems Design

MuSS Manufacturing Issues
Fundamental Principles Prof. Sang-Gook Kim
3 Macro/Meso-scales Components and Characteristics

Principles, Metrics and Types of Cross-scale Incompatibilities

Incompatibilities of Macro/Meso Parts with Micro/Nano Parts

Integrating Constraints on Macro/Meso-scale Parts
Fundamental Principles Prof. Martin L. Culpepper
4 Micro-scale Components and Characteristics

Principles of Macro/Meso-scale and Micro-scale Part Integration

Incompatibilities of Micro Parts with Nano Parts

Micro-scale Part Errors and Implications for Integration
Fundamental Principles Prof. Martin L. Culpepper Problem set 1 due
5 Nano-scale Components and Characteristics

Principles of nm-scale Physics which govern Integration Incompatibility

Nano-scale Actuators, Structures and Sensors

Trasmissability of Nano-scale Errors to Other Scales
Fundamental Principles Prof. Martin L. Culpepper
6 Scanning Probe Microscopy Project Introduction

Project Goals and Expectations

Demonstration of 2.76 SPM

Questions, Team Selection and Planning
Case Study/Application Soohyung Kim, Course TA Problem set 2 due
7 Piezo MEMS: Materials



Fundamental Principles Prof. Sang-Gook Kim Problem set 3 due
8 Piezoelectric MEMS: Applications

Piezoelectric Transducers


Sensors and Generators
Case Study/Application Prof. Sang-Gook Kim
9 Optical MEMS



Fundamental Principles Prof. Sang-Gook Kim
10 Nominal and Statistical Error Budgets

Principles of Determinism, Accuracy, Repeatability

Kinematic Error Modeling of Rigid-flexible Systems

Nominal and Probabilitic System Error Modeling
Design and Manufacturing Prof. Martin L. Culpepper Literature critiques due
11 Presentations on Paper Critiques Students Problem set 4 due
12 Mechanical Interfaces for Cross-scale Alignment

Principles of Mechanical Constraint

Design of Rigid, Flexible and Rigid-flexible Constraint

Manufacturing and Assembly of Cross-scale Interfaces
Design and Manufacturing Prof. Martin L. Culpepper
13 Mechanisms for Inter-scale Motion

Principles of Mass, Momentum and Energy Incompatibility

Momentum Incompatibilities

Energy Incompatibilities
Design and Manufacturing Prof. Martin L. Culpepper Problem set 5 due
14 Carbon Nanotubes


Properties and Applications

Issues of Manufacturing
Design and Manufacturing Prof. Sang-Gook Kim Problem set 6 due
15 Complexity of MuSS

Uncertainty and Difficulty


Functional Periodicity
Design and Manufacturing Prof. Sang-Gook Kim
16 Metrology

System Requirements

Components and Selection Process

Metrology-Machine Integration
Design and Manufacturing Guest Lecturer
17 Telescopes and the Oil Industry

X-Ray Telescopes

Oil-well MEMS Sensors

Questions and Discussion
Case Study/Application Guest Lecturer
18 Data Acquisition, Sensors and Control

Programming in Simulink®

Introduction to dSPACE Control System

Demonstration of Acquisition and Control System
Design and Manufacturing Guest Lecturer
19 Pre-amplifier Electronics

Assemble Amplifier

Interface with Data Acquisition and Controls

Characterize and Optimize Signal-to-Noise Ratio
Integration and Assembly Lab Staff
20 Probe and 3 Axis Flexure Stage

Fabricate Probes and Characterize Geometry

Fabricate and Assemble 3-axis Flexure

Characterize Six-axis Stiffness and Parasitic Errors
Integration and Assembly Lab Staff
21 Actuators

Fabricate Actuation Flexure Mounts

Characterize Flexure Mount Stiffness

Characterize Actuator-flexure Errors, Range, Resolution
Integration and Assembly Lab Staff
22 Metrology

Integrate Metrology, Actuators and Stage

Characterize/Compensate Errors, Resolution and Range

Repeatability and Stability Characterization
Integration and Assembly Lab Staff
23 Mapping

Map and Navigate Test Maze I, II, III
Integration and Assembly Lab Staff
24 Contest

Contest Introduction, Round I, Round II
Demonstration Lab Staff
25 Course Wrap up

Course Wrap up and Awards

Tau Beta Pi Evaluation

Post-class Assessment
Assessment test