6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices

Spring 2007

Prototype design of a microsystem cooler.
An illustration of the prototype design of a microsystem cooler that is being fabricated at the NASA Glenn Research Center. The microsystem cooler is suited mostly to volume-limited applications that require cooling below the ambient or sink temperature. (Image courtesy of NASA Glenn Research Center.)

Course Description

6.777J / 2.372J is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process. Prior fabrication experience is desirable. The course is worth 4 Engineering Design Points.

Recommended Citation

For any use or distribution of these materials, please cite as follows:

Carol Livermore and Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].

Special Features

Technical Requirements

Special software is required to use some of the files in this course: .m.

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Prof. Carol Livermore
Prof. Joel Voldman

Course Meeting Times

Two sessions / week
1.5 hours / session