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Wherever possible, the book citations below reflect the specific editions used in the course.



Amazon logo Plummer, James, Michael Deal, and Peter Griffin. Silicon VLSI Technology: Fundamentals, Practice, and Modeling. Upper Saddle River, NJ: Prentice Hall, 2000. ISBN: 9780130850379.

Laboratory Manual (available to students enrolled in the course)

Additional References

Amazon logo Campbell, Stephen. The Science and Engineering of Microelectronic Fabrication. 2nd ed. New York, NY: Oxford University Press, 2001. ISBN: 9780195136050.

Amazon logo Wolf, Stanley, and Richard Tauber. Silicon Processing for the VLSI Era. Vol. 1. Sunset Beach, CA: Lattice Press, 1986. ISBN: 9780961672133.

Amazon logo Sze, Simon. VLSI Technology. 2nd ed. New York, NY: McGraw-Hill, 1988. ISBN: 9780070627352.

Amazon logo Ghandi, Sorab. VLSI Fabrication Principles: Silicon and Gallium Arsenide. 2nd ed. New York, NY: Wiley-Interscience, 1994. ISBN: 9780471580058.

Amazon logo Pierret, Robert, and Gerold Neudeck. Modular Series on Solid State Devices. Reading, MA: Addison-Wesley, 1982. ISBN: 9780201052879.

Amazon logo Grove, A. S. Physics and Technology of Semiconductor Devices. New York, NY: Wiley, 1967. ISBN: 9780471329985.

Amazon logo Colclaser, R. A. Microelectronics Processing and Device Design. New York, NY: Wiley, 1980. ISBN: 9780471043393.

Amazon logo Vossen, John, and Werner Kern. Thin Film Processes. Burlington, MA: Academic Press, 1978. ISBN: 9780127282503.

Amazon logo Mayer, James, and Sylvanus Lau. Electronic Materials Science: For Integrated Circuits in Si and GaAs. Upper Saddle River, NJ: Prentice Hall, 1989. ISBN: 9780023781407.

Amazon logo Murarka, Shyam, and Martin Peckerar. Electronic Materials: Science and Technology. Burlington, MA: Academic Press, 1989. ISBN: 9780125111201.

Amazon logo Ohring, Milton. The Materials Science of Thin Films. 2nd ed. Burlington, MA: Academic Press, 2001. ISBN: 9780125249751.

Amazon logo Senturia, Stephen. Microsystem Design. New York, NY: Springer-Verlag, 2004. ISBN: 9780792372462.

Amazon logo Madou, Marc. Fundamentals of Microfabrication: The Science of Miniaturization. 2nd ed. Boca Raton, FL: CRC Press, 2002. ISBN: 9780849308260.

Amazon logo Kovacs, Gregory. Micromachined Transducers Sourcebook. New York, NY: McGraw-Hill, 1998. ISBN: 9780072907223.

Amazon logo May, G. S., and S. Sze. Fundamentals of Semiconductor Fabrication. New York, NY: John Wiley & Sons, Inc., 2003. ISBN: 9780471232797.

Amazon logo Smith, D. L. Thin Film Deposition: Principles and Practice. New York, NY: McGraw-Hill, 1995. ISBN: 9780070585027.

Writing References

Gopen, and Swan. "The Science of Scientific Writing." American Scientist 78 (Nov-Dec 1990): 550-558.

Amazon logo Perleman, Leslie, and Edward Barrett. The Mayfield Handbook of Technical & Scientific Writing. New York, NY: McGraw Hill, 1997. ISBN: 9781559346474.

Other Resources


IEEE Transactions on Electron Devices

IEEE Electron Device Letters

Journal of Applied Physics

Applied Physics Letters

Journal of the Electrochemical Society

Journal of Crystal Growth

Journal of Electronic Materials

IEEE Journal of Microelectromechanical Systems

Lab on a Chip

IOP Journal of Microengineering